ABSTRACT

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects

part |2 pages

Part 1: Understanding Through Continuum Theory

part |2 pages

Part 3: Adhesion and Friction Measurements

part |2 pages

Part 5: Adhesion Mitigation Strategies