ABSTRACT

Written by a leading expert in the field, Industrial Plasma Engineering, Volume 2: Applications to Nonthermal Plasma Processing provides a background in the principles and applications of low temperature, partially ionized Lorentzian plasmas that are used industrially. The book also presents a description of plasma-related processes and devices tha

chapter 14|36 pages

Surface Interactions in Plasma Processing

chapter 15|37 pages

Atmospheric Pressure Plasma Sources

chapter 16|39 pages

Vacuum Plasma Sources

chapter 17|83 pages

Plasma Reactors for Plasma Processing

chapter 20|51 pages

Diagnostics for Plasma Processing

chapter 21|64 pages

Plasma Treatment of Surfaces

chapter 24|38 pages

Plasma Chemical Vapor Deposition (PCVD)

chapter 25|74 pages

Plasma Etching