ABSTRACT
This book considers both the unique characteristics of biological samples and the challenges of microscale engineering. Divided into three main sections, it first examines fabrication technologies using non-silicon processes, which are suitable for the materials more commonly used in medical/biological analyses. These include UV lithography, LIGA, nanoimprinting, and hot embossing. Attention then shifts to microfluidic components and sensing technologies for sample preparation, delivery, and analysis in microchannels and microchambers. The final section outlines various applications and systems at the leading edge of Bio-MEMS technology in a variety of areas such as drug delivery and proteomics.
TABLE OF CONTENTS
part |2 pages
Part I. Basic Bio-MEMS Fabrication Technologies
part |2 pages
Part II. Microfluidic Devices and Components for Bio-MEMS
part |2 pages
Part III. Sensing Technologies for Bio-MEMS Applications